• description
• stage series
• datatsheets LPV-Serie, LPX-Serie and CRS-Serie 
   

Low cost and high precision UHV compatible motorised sample transporters

The motors and mechanisms may be baked at 200°C. Stages for light and heavy samples (up to 5 kg) are available. Motors could be supplied in a radiation hard version. Matching drives and accessories are available from AML.

Copyright AML Ltd. 1997


Copyright AML Ltd. 1997

Copyright AML Ltd. 1997
 
 

Copyright AML Ltd. 1998
 

Copyright AML Ltd. 1998

UHV-compatible Rotation Stages

mountable in any position or orientation, independent of port location, continous running

in-vacuum X, Y, Z - manipulators, multi-axis mechanisms using UHV compatible motors

Greater reliability, precision and rigidity and longer travels are achieved by using vacuum motors than by using rotary motion feedthroughs. User conveniance and safety are improved in many cases. All AML mechanisms are bakeable to 200°C and may be radiation-hardenend.

Resolutions in rotation of 0,001° and in transition of 1µm  are easily achieved. Backlash and repeatability can be controlled to comparable levels. Higher specifications can be accommodated and relaxed specifications may reduce costs. Precision stops allow any position to be found incrementally.

Sample heating and cooling can be fitted. Sample exchange means and entry locks can be supplied. All in-vacuum wiring may be fitted with connectors. A comprehensive range of controllers and accessories is available.

A large portfolio of existing designs is available to be customised at low cost. The cost is less than a comparable externally motorized mechanism.
 
 

These illustrations show typical examples of the types of mechanisms which can be constructed using slides with other standard AML products.

Mechanisms are assembled to specific customer requirements and are usually unique.  Consult your AML distributor for components or a complete system to suit your unique vacuum automation requirements.

These mechanisms provide long travel with minimum height for loads of several kilograms. They use widely-spaced 'V' roller guides and are useful in simpler compound mechanisms where the torsional loads on the carriage are either small or have a small variation. Options on resolution and backlash control are offered. Three standard lengths are stocked and variations are available.

• Standard travels 75, 165 or 255mm.
• Resolution 1µm or 4µm per step.
• Repeatability better than 0.2 or 1µm.
• Traverses up to 4 or 12mm/sec.
• Backlash negligible. See notes below.
• Axial load force <10kg or <3kg at mid-speed. Normal load force (e.g. sample weight) <20kg. Load moment <5Nm, about any axis through the carriage centre.
• Roll, pitch and yaw <25µradians, unloaded. Straightness of travel <1.3µm/100mm, unloaded.
• Roll, pitch and yaw compliance 33µradians/Nm, see notes below. Normal load compliance  0.5µm/N on table surface 1µm/N on table side.
• Carriage height 30mm. Overall height 40mm.
• Directly stackable for XYZ with no additional hardware. AML LCT, CRS etc. also stack directly.
• Can be used in any orientation.
• UHV - compatible materials and construction. All non-magnetic stainless-steel except aluminium bronze drive nut. Leadscrew has diamond-like coating and burnished MoS₂ lubricant film. Running surfaces are TiN-coated or nitrided.
• Suitable for use below 1 x 10^-10 mBar.
• Bakeable to 200° C (limited by motor).
• Gamma radiation - hard to 1 x 109 Rad (when used with B14.1R motor).
• Replaces AML LST at lower cost.

BACKLASH. Backlash in the gearbox of LPVxxH is controlled by special gearing and is negligible.  Backlash between the nut, leadscrew and bearings is controlled by axial load forces or a constant-force control device, option R or S, if these are not favourable.  In most cases (where the load force is less than 10N) a backlash control option is not necessary.  If the transporter is used for motion with a significant vertical component (>30°), mount the motor at the top, because the load provided by the carriage weight is sufficient to eliminate backlash. Since speeds are low, acceleration forces are negligible.  In the case of a maximum normal load (a 20kg weight) moving horizontally, option R is adequate. Consult AML for other cases.

CARRIAGE COMPLIANCE. The carriage will deflect under load moments about the principal axes by 33mradian per Nm.  In most applications the load moment will be constant and the deflection can be compensated for in the
mounting arrangement.  AML can supply sample plates with jack screws for this purpose.  For stacked XY motions in a horizontal plane the movement of the carriage and load on the upper transporter will produce a varying moment about the axis of the lower transporter.  Minimise this by stacking the shorter transporter on the longer and arrange the centre of gravity of the upper within the area above the carriage plate of the lower.

For loads with larger moments, weights or forces use an AML LPX transporter. These are essential for the bottom stages of XYZ mechanisms.

VERNIER STOP.  These transporters may be driven to the limits of their travel and stalled without damage.  There will be several steps of lost motion.  A vernier stop, option 'V', at the motor end will reduce this to less than 1µm.  A vernier stop reduces the travel by 10mm.

These mechanisms provide translation for loads of up to several tens of kilograms. They are generally similar to the AML LPV series, but use crossed-roller guides. They have very high rigidity, which is necessary where several transporters are stacked for compound motion or where offset loads are present. Options on resolution and backlash control are offered. They are manufactured to order, so that design variations can be incorporated at modest cost.

• Travels 25, 55, 85 or 115, custom to 175mm.
• Resolution 1µm or 4µm per step.
• Repeatability better than 0.2 or 1µm.
• Traverses up to 4 or 12mm/sec.
• Backlash negligible. See notes below.
• Axial load force <10kg or <3kg at mid-speed. Normal load force (e.g. sample weight) <50kg. Load moment <20Nm.
• Roll, pitch and yaw <25µradians, unloaded. Straightness of travel <1.3µm/100mm, unloaded.
• Roll compliance 5µradians/Nm, pitch and yaw compliance 2µradians/Nm, see notes below. Normal load compliance  0.1µm/N.
• Replaces AML LPV for larger loads and rigidity.
• Carriage height 30mm. Overall height 40mm.
• Directly stackable for XYZ with no additional hardware.  AML LPV, LCT, CRS etc. also stack directly.
• Can be used in any orientation.
• UHV - compatible materials and construction. All non-magnetic stainless-steel except aluminium bronze drive nut. Leadscrew has diamond-like coating and burnished MoS₂ lubricant film. Running surfaces are TiN-coated or nitrided.
• Suitable for use below 1 x 10^-10 mBar.
• Bakeable to 200° C (limited by motor).
• Gamma radiation - hard to 1 x 109 Rad (when used with B14.1R motor).
• Replaces AML LSC at lower cost.

BACKLASH.   Backlash in the gearbox of LPXxxH is controlled by special gearing and is negligible.  Backlash between the nut, leadscrew and bearings is controlled by axial load forces or a constant-force control device, option R or S, if these are not favourable.  In most cases (where the load force is less than 10N) a backlash control option is not necessary.  If the transporter is used for motion with a significant vertical component (>30°), mount the motor at the top because the load provided by the carriage weight is sufficient to eliminate backlash. Since speeds are low, acceleration forces are negligible.  In the case of a maximum normal load (a 50kg weight) moving horizontally, option R is adequate.  Consult AML for other cases.

ROLL COMPLIANCE.   Multiple-axis mechanisms can produce varying roll moments about the bottom transporter.  The LPX carriage will deflect about the roll axis at 5mradian per Nm.  To achieve this performance the transporter must be fixed to an extremely rigid, flat baseplate, using all of the base fixings.  For longer transporters fixed only by the central holes, the roll compliance will increase steadily by two or three times toward the ends of travel, due to twisting of the base.

Where LPV transporters are stacked on LPX arrange that the LPX has the shorter travel for economy of cost and space.

For loads with larger moments, weights or forces these designs can be adapted at low cost.

VERNIER STOPS.   These transporters may be driven to the limits of their travel and stalled without damage.  There will be several steps of lost motion. A vernier stop, option 'V' will reduce this to less than 1µm.  A vernier stop reduces the travel by 10mm per stop.

Using the B14.1 motor these high-resolution rotation stages provide convenient, cost-effective and automated sample handling in UHV without the use of edge-welded bellows.

• Can be mounted in any position or orientation, independent of port locations.
• CRS10K/20K/30K can be mounted directly on various AML translation stages or stacked on another CRS without additional hardware.  Standard fixing - hole patterns are provided on the side ("B"), base ("A") and rotating table ("C").
• Intended for intermittent rotation of balanced loads of up to 1kg or as a precision gearbox.
• Weight 600 to 900 grams, including motor.
• Resolution from 0.036° to 0.003° per step.
• Unloaded backlash is less than resolution.
• No lubricants. The life of the worm wheel can be extended by lubrication with Fomblin R low-vapour pressure grease. Option 'G'.
• Uses AML B14.1 Vacuum Stepper Motor. A radiation-hard version of this motor is available.
• Simplified connection with AML wiring accessories.  Can be supplied pre-wired to a vacuum connector for immediate connection to an AML MLF12 feedthrough.
• Suitable for use below 1 x 10^-10 mB
• Bakeable to 200°C.
• Open construction with all internal spaces ventilated.
• Custom sample, stacking or offset plates, brackets, etc. to order.
• Vernier rotation stops with repeatability comparable to the resolution can be fitted.  All other positions can be found by indexing.

Most mechanisms manufactured by AML are designed or adapted to customer requirements. Consult us for components or a complete system to suit your application.

This file and the designs depicted are the copyright of Arun Microelectronics Ltd.. Specifications are subject to change, confirm before ordering.  E & OE

manufacturer: AML