Reuterweg 65 D-60323 Frankfurt/M Tel +49 (0)69-720040 Fax +49 (0)69-720400 info@tectra.de
 

Titanium Sublimation Pump and Controller

AML logo
MODEL TSP2




pdf version of data sheet (147kB)pdf version of data sheet (131kB)

The AML Titanium-Sublimation Pump Controller regulates the quantity of material sublimated from the Filaments, compensating for changing conditions and eliminating the need for operator attendance or adjustment. 

Titanium Sublimation Pump Controller

  • 2U (88mm) high full-width instrument for easy rack-mounting.
  • Low cost. Simple, robust and reliable design, which is easy to service. All output switching is by semiconductor devices.
  • Low-noise. Complies with EC EMC and LV Directives. Power factor >0.97.
  • Sublimation current settable over the range 30 to 55A in increments of 0.1A. Suits 85% Ti, 15% Mo filaments from 1.8 to 2.1mm diameter.
  • Filaments are warmed and cooled gently to avoid thermal shocks.  The sublimation current contains minimal harmonics to reduce the risk of early filament failure due to magnetostrictive stress or mechanical resonance.
  • Pump current is accurately controlled in order to automatically compensate for mains variations and pump cables warming.
  • No in-service adjustment is required.
  • Self-timed delay between getter renewal adjustable from 1 minute to 9,9 hours.
  • Filaments may be run for degassing at currents between 5 and 25A to prevent overloading the ion pump. Filaments can be kept warm at the end of a system bake.
  • Can be easily interfaced to PGC1 Pressure Gauge Controller for automatic control.
  • Sublimation inhibit/trigger function by external switch or relay.
  • Suitable for a wide range of cartridges with up to 4 filaments.
  • Indicates open-circuit filament, shorted cable/filament, inhibit, overtemperature. Thermal overload protection.
  • Optional RS422/RS485 serial interfaces for monitoring and full control.

 
Specification
Operating Temperature: 10 to 40oC for rated performance. Operation up to 50oC is possible at longer sublimation intervals, i.e. below 10-6 mbar.
Supply Voltage: 220/230V RMS 50 Hz (or 100/110V 60 Hz Option L)
Power Consumption: Less than 20 watts when idling, less than 700 watts when sublimating at  55A with a maximum-length cable.
Power Factor > 0.97 at maximum output power
Output Current: Regulated at 30 to 55A RMS x 0.1 A in sublimation, 5 to 25A RMS x 5A in degas.
Output Voltage: The output voltage is determined by the lead and canridge resistance. Maximum output voltage is > 9.5 VRMS at 45A.
Timing: Sublimation period 0.1 to 3 minutes x 0.1 min..  Delay interval 1 to 59 minutes,1 to 9.9 hours. Degas time 1 to 99 minutes. All timing is derived from the mains supply frequency.
Output Duty Cycle: 100% at 300W output power and less than 30°C ambient temperature.

Titanium Sublimation Pump Controller front view
Titanium Sublimation Pump Controller front view


Dimensions
Width: 
Depth: 
Height: 
TSP2 weight 
TSP2 shipping weight 
TSP216 weight 
483mm 
365.2mm 
88mm 
11 kg 
13 kg 
2.5 kg 
Ordering information: TSP2 Titanium Sublimation Pump Controller 
add suffix H for 220/240 volt mains supply 
add suffix L for 100l110 volt mains supply 
add suffix F for RS422/RS485 interface 
add suffix P for isolated RS422/RS485 interface (MOQ 5 units) 

TSP2l6 6 metre non-bakeable pump lead 
TSP2Ll0 10 metre non-bakeable pump lead 

Related products: NGC2  UHV Pressure Gauge Controller with bakeout and TSP control facilities
Titanium Sublimation Pump
Cryoshroud
spare filaments
 

Further available:

  • Titanium Filaments mounted on CF-35 (2.75" OD) flange
  • Cryoshroud assembly for titanium sublimation pump on CF-160 (8"OD) mounting flange (pump not included
  • spare filaments for titanium sublimation pumps type VAR and PE
Titanium Sublimation Pump
 

TSP shroud (pump not included)

spare filaments for titanium sublimation pumps

spare filaments for titanium sublimation pumps

 



Quick links to other major tectra products:

Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen SourceSputter Gun - Mini-Coater Deposition System - Sputter-Coater


   
  contact : Dipl-Ing. Andreas Gati
tectra GmbH
Reuterweg 65
D-60323 Frankfurt
phone: Germany (0) 69 - 72 00 40
fax: Germany (0) 69 - 72 04 00 
email: info@tectra.de
home: www.tectra.de
  last update: 27.5.06 
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