||Reuterweg 65 • D-60323 Frankfurt/M • Tel +49 (0)69-720040 • Fax +49 (0)69-720400 • email@example.com|
vacuum coating system for thin film deposition
enlarges it’s successful range of small high vacuum coating
systems by the ‚Sputter Coater‘. Besides the Mini
Coater which is dedicated for thermal and e-beam evaporation the
Sputter Coater serves the applications where also magnetron sputter
deposition is also required. Because of it's modular design and very
flexible configuration possibilities it's an ideal research and
development tool with easy possibility to adapt the sytem to frequent
changing of R&D subjects.
Coater allows the major vacuum thin film coating techniques:
Sputter coater bottom plate showing sputter magnetron (top), mini e-beam evaporator (left) and thermal boat evaporator (bottom).
it’s open design regarding the sample holder a wide variety
of samples from several mm up to about Ø250mm can be coated.
Sample holder for multiple samples can easily be considered. Further, a
very big CF160 (8“OD) flange on the top position allows
special sample holder systems with e.g. rotation, heating, cooling,
biasing etc. even to be retrofitted by the
Sputter magnetron with Argon plasma
Inner view showing sputter magnetron, mini e-beam evaporator, boat evaporator, plasma cleaner and sample holder platform.
Sputter Coater with built-in motorised sample rotation
and quartz microbalance
Sputter Coater dimensions main rack
Quick links to other major tectra products:
Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen Source - Sputter Gun - Mini-Coater Deposition System - Sputter-Coater
phone: Germany (0) 69 - 72 00 40,
fax: Germany (0) 69 - 72 04 00
|last update: 15.12.2011|