Reuterweg 65 D-60323 Frankfurt/M Tel +49 (0)69-720040 Fax +49 (0)69-720400 info@tectra.de
 
 

Residual Gas Analyser

The AX-200 mass spectrometer system can be configured to meet most gas analysis and process monitoring applications. With mass ranges up to 300amu and a choice of detector systems the AX-200 may be supplied as an "add on" to an existing vacuum system or as a complete stand alone unit with integrated vacuum and inlet system. The AX-200 uses a PC Computer as its system controller and its operating software is written in a high level language. This simplifies updating, and allows easy customising to meet specific process requirements. The user-friendly software operating under 'Windows 95/98' make the AX-200 easy to use in all RGA and gas analysis applications.
 
 
The Analyser.

The quadrupole analyser is available with a choice of ion sources, mass filters and detection systems. The standard ion source is a radially symmetrical design fitted with twin filaments and suits most applications. The standard filaments are tungsten but thoria coated iridium are available if required.

The Electronics Unit. 

This compact unit contains the complete quadrupole electronics and plugs directly onto the analyser. Communication with the PC Computer is via the RS232.

The unit has a performance and features only found on more expensive RGA's, and yet its small size and low cost is achieved by the use of the very latest electronic techniques.

AX-200 Residual Gas Analyser

 

Software features

The new 'Windows' RGA software for the AX-200 mass spectrometer has been designed to be 'user friendly' and very simple to learn and use. For detailed information refer to the separate software leaflet.
 
 
 
 
 
Technical Data
Mass Range 1-100 or 2-200 std. (options available)
Resolution 10% valley between equal peaks.
Minimum detectable partial pressure 2x10-11mBar Faraday, 2x10-13mBar SEM
Minimum detectable total pressure 1 x 10-11 mBar.
Maximum operating pressure 1x10-4mBar Faraday, 1x10-5mBar SEM
Electron energy 70eV
Ion Energy 6eV
Emission 1 mA *
Bake-out temperature 250°C recommended. 350°C maximum
R.F frequency 1.84Mhz std.(options 1.6Mhz - 4.9Mhz)
R.F. amplitude 800V p/p at maximum mass
Rod diameter 6.35 m.m.
Rod length 100 m.m. std. 
Power requirements 17-26VDC 15Watt
Software specification Refer to separate Software Leaflet.
P.C .Computer required. 486/66 minimum. Pentium preferred.

Order Information. - AX-200.  
Complete Instruments AX-200/100F 100amu RGA with Faraday Detector
  AX-200/100M 100amu RGA with Dual Detector
  AX-200M 200amu RGA with Dual Detector
Spare Analyzer Heads AH200F 100/200 Analyzer with Faraday Detector
  AH200M 100/200 Analyzer with dual detector
Spare Filaments SM100FW Pack of 4 tungsten
  SM100FT Pack of 2 Thoria coated Iridium
Dimensions

Electronics unit 6 x 3 x 3.5 inches (152 x 76 x 88mm)


Quick links to other major tectra products:

Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen SourceSputter Gun - Mini-Coater Deposition System - Sputter-Coater


   
contact : Dipl.-Ing. Andreas Gati
tectra GmbH, D-60323 Frankfurt, Reuterweg 65,
phone: Germany (0) 69 - 72 00 40,
fax: Germany (0) 69 - 72 04 00
email: info@tectra.de
home: www.tectra.de
last update: 26.05.06