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Mini
MBE-Systems
tectra's Mini-MBE systems have
been specifically designed to serve the scientific community as an
epitaxial growth tool both for conventional and emerging novel
materials. Key features of this design are:
- modular chamber concept,
- compact and therefore cost effective construction,
- control system with the utmost access to growth
parameters,
- easy transfer between adjacent preparation and
analytical chambers,
- full manipulation of the sample.
Further
specs:
- Standard sample holder with an indium-free mount,
incorporates all the necessary axes of movement to allow RHEED analysis
at angles of incidence down to zero degrees.
- Samples are transported face down.
- Vertical growth chamber configuration to ensure
the highest possible fill level for all the effusion cells and
therefore the longest, uninterrupted, run-time of the system.
- modular chamber body design allows just one
section to be changed, e. g. the source level, if required by a future
change in research direction or as interesting new evaporation and
deposition techniques become available.
- All the ports necessary for sample manipulation
and transfer as well as growth characterisation instruments, such as
RHEED, ellipsometers, RGA`s, film thickness and beam flux monitors are
provided as standard on the target level.
- The manipulator permits continuous rotation while
heating or cooling the substrate, with optimum heatshielding and a
proven design allowing temperatures up to 1.500°C (depending on
sample size) to be realised.
- The source level can be configured to accept
almost any customer specified combination of devices; choices include
effusion cells with up to 125 cc capapacity or capable of
2.000°C, cracker cells, e-beam and mini e-beam evaporators as
well as gas crackers for nitrogen and oxygen etc.
- high effusion cell purity is maintained during
use, due to the "soft action" shutter mechanism.
- Standard pumping configurations include a
combination of ion getter, titanium sublimation and turbomolecular
pumps. Cryopumps can also be optionally installed. Such a truly modular
approach dispenses with the cumbersome business of modifying an entire
MBE chamber when changes become necessary.
Standard MBE Manipulator with rotation, Z-motion,
shutter, heating, heatshields and thermocouple
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