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ast update 18.10.2006
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vacuum, ultra high vacuum, UHV, MBE, evaporation, deposition, plasma source, atom source, electron beam evaporator, microwave ion source, e-beam evaporator, ecr source, molecular beam epitaxy, sputter gun, effusion cell, atom source, GaN, GaAlN, nitriding, hydrogen cracking source, thin films, atomic hydrogen source, microwave ion source
