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Atomic Hydrogen Source
Thermal hydrogen cracker
H-flux Atomic Hydrogen Source with optional shutter
The new H-flux Atomic Hydrogen Source* works by thermally dissociating hydrogen in an electron bombardment heated fine tungsten capillary (thermal hydrogen cracker). By bouncing along the hot walls the molecular hydrogen is cracked to atomic hydrogen. This is e.g. very useful for in-situ, damage free cleaning of residual oxygen prior to sample coating or analysis. Other applications are in surface modifications appreciating the high reactivity of atomic species.
Atomic Hydrogen can be used in surface science and thin film technolgy (MBE, GSMBE) mainly for the following applications:
Key features of the H-flux Atomic Hydrogen Source
are the zero residual ion current and almost 100% cracking efficiency,
due to the superior and unique Bertel design. Integral watercooling is
included as standard to minimise heat load in the system and
outgassing. A manual shutter is available as option.
"Simple source of atomic hydrogen for ultrahigh
vacuum applications", U. Bischler and E. Bertel; J. Vc. Sci. Technol. A
11(2), Mar/Apr 1993
* In cooperation with Prof. Dr. E. Bertel of the University of Innsbruck
In the interests of continuous product development, specifications are subject to change without notice.
Quick links to other major tectra products:
Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen Source - Sputter Gun - Mini-Coater Deposition System - Sputter-Coater
Dipl.-Ing. Andreas Gati
phone: Germany (0) 69 - 72 00 40
fax: Germany (0) 69 - 72 04 00
|last update: 26.5.06|