|
|
|
|
Reuterweg 65 • D-60323 Frankfurt/M • Tel +49 (0)69-720040 • Fax +49 (0)69-720400 • info@tectra.de |
|
4 samples are placed on a turntable. The coating
position is at the 12 o'clock position which is heated by a Boralectric
heater. In front of the turntable there is a motorized shutter. In the
coating position the sample can be positioned in X, Y and tilt (relativ
to sample center point). The accuracy is up to 0,001mm/0,01°.
The whole assembly can be turned for >270° to face 3
different magnetron sputter sources. Greater reliability, precision and rigidity and longer travels are achieved by using vacuum motors than by using rotary motion feedthroughs. User conveniance and safety are improved in many cases. All AML mechanisms are bakeable to 200°C and may be radiation-hardenend. Resolutions in rotation of 0,001° and in transition of 1µm are easily achieved. Backlash and repeatability can be controlled to comparable levels. Higher specifications can be accommodated and relaxed specifications may reduce costs. Precision stops allow any position to be found incrementally. Sample heating and cooling can be fitted. Sample exchange means and entry locks can be supplied. All in-vacuum wiring may be fitted with connectors. A comprehensive range of controllers and accessories is available. A large portfolio of existing designs is available
to be customised at low cost. The cost is less than a comparable
externally motorized mechanism. |
|
Quick links to other major tectra products: Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen Source - Sputter Gun - Mini-Coater Deposition System - Sputter-Coater |
|
| contact : | Dipl.-Ing.
Andreas Gati tectra GmbH, D-60323 Frankfurt, Reuterweg 65, phone: Germany (0) 69 - 72 00 40, fax: Germany (0) 69 - 72 04 00 email: info@tectra.de home: www.tectra.de |
|
| last update: 20.12.97 |