Reuterweg 65 D-60323 Frankfurt/M Tel +49 (0)69-720040 Fax +49 (0)69-720400 info@tectra.de
 
in vacuum goniometers
standard and custom made in vacuum goniometers

4-Axis Goniometer 
Copyright AML Ltd. 1997
 
6-Axis Goniometer
Copyright AML Ltd. 1997
 
goniometers for up to six axis for UHV applications.
Goniometer Front Viewo Goniometer Rear View
Copyright AML Ltd. 1997 
6-axis goniometer for a coating system

4 samples are placed on a turntable. The coating position is at the 12 o'clock position which is heated by a Boralectric heater. In front of the turntable there is a motorized shutter. In the coating position the sample can be positioned in X, Y and tilt (relativ to sample center point). The accuracy is up to 0,001mm/0,01°. The whole assembly can be turned for >270° to face 3 different magnetron sputter sources.

multi-axis mechanisms using UHV compatible motors

Greater reliability, precision and rigidity and longer travels are achieved by using vacuum motors than by using rotary motion feedthroughs. User conveniance and safety are improved in many cases. All AML mechanisms are bakeable to 200°C and may be radiation-hardenend.

Resolutions in rotation of 0,001° and in transition of 1µm are easily achieved. Backlash and repeatability can be controlled to comparable levels. Higher specifications can be accommodated and relaxed specifications may reduce costs. Precision stops allow any position to be found incrementally.

Sample heating and cooling can be fitted. Sample exchange means and entry locks can be supplied. All in-vacuum wiring may be fitted with connectors. A comprehensive range of controllers and accessories is available.

A large portfolio of existing designs is available to be customised at low cost. The cost is less than a comparable externally motorized mechanism.



Quick links to other major tectra products:

Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen SourceSputter Gun - Mini-Coater Deposition System - Sputter-Coater


   
  contact : Dipl.-Ing. Andreas Gati
tectra GmbH, D-60323 Frankfurt, Reuterweg 65,
phone: Germany (0) 69 - 72 00 40,
fax: Germany (0) 69 - 72 04 00
email: info@tectra.de
home: www.tectra.de
  last update: 20.12.97
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