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Effusion Cell
The tectra effusion cells are
low-cost, general purpose 10ccm (or 20ccm, 30ccm) thermal evaporator. They
are based on robust and reliable pyrollytic Boron Nitride (pBN) encapsulated
graphite heater from Advanced Ceramics. There are no filaments to wind,
to burn out or to short circuit. They are also resistant to burn-out in
the event of air-inrush into the chamber while hot. As the graphite is also
fully protected by pBN, they can be etched clean in the even of crucible
spillage or breakage leading to coating of the heater e.g. with aluminium.
The crucible fits into the
tube heater, which is surrounded by a Ta heatshield pack. The thermocouple
is clamped to the heater near the bottom of the crucible inside the lower
heatshields. Stainless steel legs support a high purity alumina heat-break
on which the heater is mounted.
The tectra Effusion Cells
are supplied with a matching power supply and PID controller and are capable
of temperature stabilty better than ±0.5°C. The operating temperature
can be much higher than specified when considering the outgassing of N
from the Boron Nitride parts such as crucible.
Effusion Cell
- Original Boralectric®
pBN encapsulated graphite tube heater
- pBN Crucible with 10ccm,
20ccm or 30ccm capacity
- Crucible and heater supports
with thermal break
- Power and thermocouple
feedthroughs mounted on CF35 flange (2.75"OD)
- Thermocouple
- Ta heatshield pack and
contacts
- Cables
- Power supply with PID
temperature controller
Specifications
| Crucible volume: |
10ccm, 20ccm or 30ccm
(to brim) |
| Operating temperature: |
1.250°C |
| Outgassing temperature: |
1.300°C |
| Temperature stability |
better than ±0.5°C
at 1.000°C |
| Bakeout: |
max. 200°C |
| Mounting: |
CF35 (2.75"OD) |
| Max. in vacuum diameter: |
34mm |
| Length: |
250mm (others on request) |
| Power supply: |
3.5 kW |
| Temperature controller: |
PID controller with digital
display |
| Options: |
Shutter, watercooling |
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