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Effusion
Cell
Thermal
evaporation source for vacuum thin film deposition
The
tectra effusion cells are
low-cost, general purpose 10ccm (or 20ccm, 30ccm) thermal evaporator.
They
are based on robust and reliable pyrollytic Boron Nitride (pBN)
encapsulated
graphite heater from Advanced Ceramics. There are no filaments to wind,
to burn out or to short circuit. They are also resistant to burn-out in
the event of air-inrush into the chamber while hot. As the graphite is
also fully protected by pBN, they can be etched clean in the even of
crucible
spillage or breakage leading to coating of the heater e.g. with
aluminium.
The crucible fits into the
tube heater, which is surrounded by a Ta heatshield pack. The
thermocouple
is clamped to the heater near the bottom of the crucible inside the
lower
heatshields. Stainless steel legs support a high purity alumina
heat-break
on which the heater is mounted.
The tectra Effusion Cells
are supplied with a matching power supply and PID controller and are
capable
of temperature stabilty better than ±0.5°C. The
operating temperature
can be much higher than specified when considering the outgassing of N
from the Boron Nitride parts such as crucible.
Effusion Cell with watercooling shroud and shutter
Effusion Cell
- Original Boralectric® pBN encapsulated
graphite tube heater
- pBN Crucible with 10ccm, 20ccm or 30ccm capacity
- Crucible and heater supports with thermal break
- Power and thermocouple feedthroughs mounted on CF35
flange (2.75"OD)
- Thermocouple
- Ta heatshield pack and contacts
- Cables
- Power supply with PID temperature controller
Specifications
| Crucible volume: |
10ccm, 20ccm or 30ccm (to rim) |
| Operating temperature: |
1.250°C |
| Outgassing temperature: |
1.300°C |
| Temperature stability |
better than ±0.5°C at
1.000°C |
| Bakeout: |
max. 200°C |
| Mounting: |
CF35 (2.75"OD) |
| Max. in vacuum diameter: |
34mm |
| Length: |
250mm (others on request) |
| Power supply: |
3.5 kW |
| Temperature controller: |
PID controller with digital display |
| Options: |
Shutter, watercooling |
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