Reuterweg 65 D-60323 Frankfurt/M Tel +49 (0)69-720040 Fax +49 (0)69-720400 info@tectra.de

Bakeout Equipment for Vacuum Systems
  • Insulating Bakeout Tents 

  • The insulating bakeout tents for the baking of UHV systems are made from a special flexible wall material. The standard wall material consists of glass fibre insulation with silicon coated glass fibre material as the outermost layers and is designed for a maximum surface temperature of 250°C. The tent parts are easily fixed together using a special high temperature Velcro. One further advantage is the very low storage space required when not in use. All tents will be custom made. Other materials e. g. for higher bakeout temperature or cleanroom compatibility are available on request.

    pdf version of data sheet (249kB)pdf version of bakeout tent data sheet (309kB) 
     
     

    Specifications:

    max Temp:
    - Silicone Fabric: 250°C
    - Teflon Fabric: 260°C
    - Glassfibre fabric: 500°C

    Thickness: 7,14, 21 and 28 mm

    Thermal conductivity: 200°C<0,055W/mk
                                        300°C<0,075W/mk
    Fastening: by Velcro
     
     

Bakeout tent with opening for Heater Fan
Bakeout tent with opening for Heater Fan

Velcro fastening of bakeout tent panels
Velcro fastening of bakeout tent panels

heating tent system for UHV chamber with load-lock and transfer arm
heating tent system for UHV chamber with load-lock, transfer arm and heater fan
 

  • Standby Bakeout Heater Fan
  •  
    powerful bakeout heater fan with 2.5 kW heating power and 200 m3/h air circulation for very even and gentle heating of valuable instruments. The powerful hot air ir re-circulated under the tent and avoids a strong temperature gradient to be found with conventional heating systems. 

    Standard feature is a temperature controller allowing a pre-set temperature in the range of 50°C to 250°C for optimum protection of sensitive instruments, Viton® sealed valves etc. Units available for 240V/50Hz.

    Free standing design to be mounted onto or under system table. When not in use it can be packed away saving valuable bench space. Design optimised to use with bakeout tents but usable also with bakeout boxes.
     
     

    Bakeout Heater Fan Dimensions
     

Heater Fan (front side)
 

Heater Fan (bakeout side)

  • Bakeout Heating Tapes 

  • High quality glass fibre or metal braided heating tapes. Standard lengths (1 m, 2m, 3 m, 5 m) available from stock. 
     
    Item Load
    HB1 / HB1-M 165 W
    HB2 / HB2-M 250 W
    HB3 / HB3-M 400 W
    HB5 / HB5-M 750 W

    HBx: Standard Tape x m Length
    HBx-M: Metal Braided Tape x m Length

    Max. Temperature: 400°C
    Operating Voltage: 220 V
    Tape width: 30 mm / 18 mm
    Insulation: glasfibre
    Cold ends: 1 m (0,75mm²)/0,6 m (0,75mm²)

    HBx / HBx-M

Heating Tape (standard)

Heating Tape (metal braided)

  • Bakeout Heating Jackets  

  • jackets comprise a spiral heating element attached to a glass fibre cloth (a layer of ceramic fibre of glass fibre insulation). The outer surface is made of aluminized glass fibre. They can be tailored to suit your chamber and have a maximum operating temperature of 400°C.

    Specifications:

    max Temp:
    - Teflon Fabric: 200°C
    - Glassfibre Fabric: 400°C

    Insulation: Glassfibre

    Thermal conductivity: <0,05W/mk

    Fastening: by Velcro or hooks

    Cold leads: standard 2m

    Voltage: 110V/220V/240V

    Standard: Acc to EN61010-1 1993+Parts of EN 61010-2-010 1995

Heating Jacket (Teflon coated)

 

  • Cleanroom Heating Jackets  

  • cleanroom compatible heating and insulating jackets for research and production lines standard and custom designed parts are available 

    Specifications:

    max Temp:
    - Al-Foil Fabric: 100°C
    - Teflon Fabric: 200°C

    Insulation: Nomex 10-30mm

    Thermal conductivity: <0,04W/mk

    Cold leads: standard 2m 

    Voltage: 110V/220V/240V

    ramping speed: 20-120°C ca. 30 min

    Standard: Acc to EN61010-1 1993+Parts of EN 61010-2-010 1995

Clean Room Jackets for Semiconductor Fab

 
  manufacturer: Hemi Heating AB / tectra GmbH



Quick links to other major tectra products:

Electron Beam Evaporator - 4-pocket e-beam evaporator - Plasma Source - Atomic Hydrogen SourceSputter Gun - Mini-Coater Deposition System - Sputter-Coater


   
  contact : Dipl.-Ing. Andreas Gati
tectra GmbH, Reuterweg 65,  D-60323 Frankfurt/M
phone: Germany (0) 69 - 72 00 40
fax: Germany (0) 69 - 72 04 00
email: mailto:tectra@t-online.de
home: http://www.tectra.de/
  last update: 23.6.2009
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